JPH0466380B2 - - Google Patents

Info

Publication number
JPH0466380B2
JPH0466380B2 JP60143206A JP14320685A JPH0466380B2 JP H0466380 B2 JPH0466380 B2 JP H0466380B2 JP 60143206 A JP60143206 A JP 60143206A JP 14320685 A JP14320685 A JP 14320685A JP H0466380 B2 JPH0466380 B2 JP H0466380B2
Authority
JP
Japan
Prior art keywords
region
film
oxide film
base
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60143206A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622657A (ja
Inventor
Tadashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60143206A priority Critical patent/JPS622657A/ja
Priority to GB08604500A priority patent/GB2175136B/en
Priority to US06/833,327 priority patent/US4728618A/en
Publication of JPS622657A publication Critical patent/JPS622657A/ja
Publication of JPH0466380B2 publication Critical patent/JPH0466380B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP60143206A 1985-04-10 1985-06-28 半導体装置の製造方法 Granted JPS622657A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60143206A JPS622657A (ja) 1985-06-28 1985-06-28 半導体装置の製造方法
GB08604500A GB2175136B (en) 1985-04-10 1986-02-24 Semiconductor manufacturing method
US06/833,327 US4728618A (en) 1985-04-10 1986-02-25 Method of making a self-aligned bipolar using differential oxidation and diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60143206A JPS622657A (ja) 1985-06-28 1985-06-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS622657A JPS622657A (ja) 1987-01-08
JPH0466380B2 true JPH0466380B2 (en]) 1992-10-23

Family

ID=15333347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60143206A Granted JPS622657A (ja) 1985-04-10 1985-06-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS622657A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234564A (ja) * 1985-04-10 1986-10-18 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS622657A (ja) 1987-01-08

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